Complete Thick-SOI Tech & PDK
  • Makes breakthroughs in key core technologies such as the preparation of high-quality thick silicon waveguides, high-quality Ge/SiGe selective epitaxy and etching, and the development of low-loss end-face couplers.

  • Establishes a complete set of integration technologies for thick silicon SOI silicon photonics with low transmission loss, polarization insensitivity, and high process tolerance performance.

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