SITRI's 8-inch MEMS platform focuses on the development of core process technologies and provides customers with pilot production and mass production services. The platform has a clean room of nearly 5,000 square meters. Its technical capabilities are compatible with CMOS processes and MEMS special processes, enabling R&D and small volume production of various products. The platform can comprehensively carry out the R&D and pilot production of surface, bulk silicon, as well as new processes, new devices, and new systems. It can achieve seamless connection from product research and development to pilot production. The platform has established complete integrated process and pilot production platforms for various MEMS intelligent sensors such as temperature, infrared, inertial, pressure, and acoustic sensors. Additionally, the platform has developed and released 14 sets of standardized process modules (PDK), continuously meeting the needs of new technology development, commercialization, and market applications.

MEMS Application Scenario